OUR PRODUCTS
Silicon Slotted Rings
Control during the plasma etch process takes innovative solutions with microscopic accuracy; our silicon slotted rings are uniquely positioned to deliver world class etch performance and consistent plasma distribution, thanks to exacting dimensions and distinctive slotting features.
What makes us better
- Uniformity of slots offers better plasma control
- Machining accuracy and reproducibility, critical for etch uniformity and high quality wafers
Silicon Electrodes
Our silicon electrodes incorporate exact hole drilling, accurate CNC machining, and lapping and polishing techniques. We continue to innovate our silicon electrode manufacturing processes, creating precision gas holes and customized surface shapes. This results in better etch uniformity in plasma etch chambers.What makes us better
- Customizable surface shapes
- Advanced capability to drill damage-free holes
Silicon Rings
Precision machining and defect-free bulk source material are the keys to our silicon edge rings. Working together with our electrodes and confinement rings, edge rings help protect underlying components from damage and ensure a controlled plasma etch process and high-quality wafers.
What makes us better
- Dimensional control
- Surface finish control
Silicon Targets
Thin film deposition requires a high purity source material – whether customers need ingots, blanks, chamber parts, or other customized components for the optical market, we craft our targets with top quality silicon and machine according to high standards, making them the highest caliber choice for Physical Vapor Deposition.What makes us better
- High purity silicon
- Surface finish control
- Accuracy and dimensional control
Custom Parts and Precision Components
For any custom component or assembly, we use our engineering and manufacturing expertise to take customer concepts to full production.
Our production and engineering teams add value each step of the way, from unique silicon material requirements, component concept and design to full-scale production. We provide in-house silicon growing facilities, ingot slicing and shaping, state-of-the-art machining capabilities and supply chain management.
